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JAEA Reports

Thermodynamic calculations for chemical vapor deposition of silicon carbide using ehyltrichlorosilane

Nakano, Junichi; Yamada, Reiji

JAERI-Research 95-045, 26 Pages, 1995/06

JAERI-Research-95-045.pdf:1.08MB

no abstracts in English

JAEA Reports

Themodynamic Calculations for Chamical Vapor Deposition of Silicon Cable

Minato, Kazuo; ; Ikawa, Katsuichi

JAERI-M 85-043, 27 Pages, 1985/03

JAERI-M-85-043.pdf:0.9MB

no abstracts in English

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